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  Search result  Your search for [subject]Zirconium compounds returned 1 record.  
     
  Book Thin-film deposition of zirconium nitride (ZrN) via the plasma sputter-type multicusp ion source.

by Valmoria, Nicomedes Baz; 2000.

Subject: Thin films; Zirconium compounds; Plasma (ionized gases).

 
     
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