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  Search result  Your search for [subject]Silicon nitride returned 6 records.  
 
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  Thesis Parametric and kinetic study of Silicon Nitride Film Deposition on Silicon Wafer by Low Pressure Chemical Vapor Deposition (LPCVD) method.

by Velasco, Angelito A.; 2002.

Subject: Silicon nitride.

 
     
Relevance: 19.10%
 
     
  Analytics Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition.



Subject: Silicon nitride; Microelectronics industry.

 
     
Relevance: 18.68%
 
     
  Book Silicon nitride in electronics.

New York: Elsevier, 1988.

Subject: Microelectronics -- Materials; Silicon nitride.

 
     
Relevance: 18.68%
 
     
  Book Silicon nitride for microelectronic applications.

by Milek, John T.; New York: IFI/Plenum.

Subject: Microelectronics -- Materials; Silicon nitride.

 
     
Relevance: 18.68%
 
     
  Thesis Parametric and kinetic study of silicon nitride film deposition on silicon wafer by low pressure chemical vapor deposition (LPCVD) method.

by Velasco, Angelito A.; 2002.

Subject: Silicon nitride; Chemical vapor deposition; Arrhenius equation.

 
     
Relevance: 18.08%
 
     
  Book Silicon nitride 93 : proceedings of the International Conference on Silicon Nitride-Based Ceramics, Stuttgart, October 4-6, 1993.

Aedermannsdorf, Switzerland: Trans Tech Publications, 1994.

Subject: Silicon nitride -- Congresses; Ceramics -- Congresses.

 
     
Relevance: 15.92%
 
     
 
         
         
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