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Silicon nitride
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Parametric and kinetic study of Silicon Nitride Film Deposition on Silicon Wafer by Low Pressure Chemical Vapor Deposition (LPCVD) method
.
by
Velasco, Angelito A.
; 2002.
Subject:
Silicon nitride
.
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Relevance: 19.10%
Silicon nitride (SiNxHy) by plasma-enhanced chemical vapor deposition
.
Subject:
Silicon nitride
;
Microelectronics industry
.
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Relevance: 18.68%
Silicon nitride in electronics
.
New York: Elsevier, 1988.
Subject:
Microelectronics -- Materials
;
Silicon nitride
.
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Relevance: 18.68%
Silicon nitride for microelectronic applications
.
by
Milek, John T.
; New York: IFI/Plenum.
Subject:
Microelectronics -- Materials
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Silicon nitride
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Relevance: 18.68%
Parametric and kinetic study of silicon nitride film deposition on silicon wafer by low pressure chemical vapor deposition (LPCVD) method
.
by
Velasco, Angelito A.
; 2002.
Subject:
Silicon nitride
;
Chemical vapor deposition
;
Arrhenius equation
.
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Relevance: 18.08%
Silicon nitride 93 : proceedings of the International Conference on Silicon Nitride-Based Ceramics, Stuttgart, October 4-6, 1993
.
Aedermannsdorf, Switzerland: Trans Tech Publications, 1994.
Subject:
Silicon nitride -- Congresses
;
Ceramics -- Congresses
.
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Relevance: 15.92%
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