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New anode structure
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<A> new anode-electrode structure for sputter deposition of high-quality Y-Ba-Cu-O thin films
.
by
Kisu, Takanobu
;
Subject:
High-quality Y-Ba-Cu-O thin film
;
rf magnetron sputtering
;
New anode structure
;
Reliable synthesis
;
High jc, smooth surface
.
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