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  Search result  Your search for [subject]Microlithography returned 6 records.  
 
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  Book Handbook of microlithography, micromachining, and microfabrication.

Bellingham, Wash.: SPIE Optical Engineering Press, 1997.

Subject: Microlithography; Micromachining; Microfabrication.

  
     
Relevance: 11.80%
 
     
  Book Semiconductor lithography : principles, practices, and materials.

by Moreau, Wayne M.; New York: Plenum Press, 1988.

Subject: Microlithography; Photoresists; Semiconductors.

  
     
Relevance: 11.80%
 
     
  Book Handbook of microlithography, micromachining, and microfabrication.

Bellingham, Wash.: SPIE Optical Engineering, 1997.

Subject: Microfabrication; Microlithography; Micromachining.

  
     
Relevance: 11.80%
 
     
  Book Handbook of VLSI microlithography : principles, technology, and applications.

Park Ridge, N.J., U.S.A.: Noyes Publications, 1991.

Subject: Integrated circuits - Very large scale integration; Microlithography.

  
     
Relevance: 11.29%
 
     
  Book Microcircuit Engineering 91 : proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy _ Microcircuit Engineering 91 (1991 : Rome, Italy).

Amsterdam: Elsevier, 1992.

Subject: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses; Microlithography -- Congresses.

  
     
Relevance: 10.19%
 
     
  Electronic Resource Microlithogr. world _ Microlithography world.

Port Washington, N.Y.: Penn Well Publication, published in cooperation with SPIE.

Subject: Masks (Electronics) -- Periodicals; Microlithography -- Periodicals; Semiconductors -- Design and construction -- Periodicals; Business, international. -- galestne; Business. -- galestne; Computers and office automation industries. -- galestne; Engineering and manufacturing industries. -- galestne; Microlithografie. -- gtt; BusinessComputers and office automation industriesEngineering and manufacturing industriesBusiness, international; MAG (Magazine/Journal) -- galestne.

  
     
Relevance: 7.08%
 
     
 
         
         
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