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Magnetron
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The magnetron
.
by
Latham, Robert, 1914-
; London: Chapman & Hall, 1952.
Subject:
Magnetron
.
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Relevance: 11.91%
Calorimetric measurements of the output power of the 2.48 GHz commercial magnetron
.
Subject:
Electron Cyclotron Resonance(ECR)
;
Magnetron
.
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Relevance: 11.39%
Improved magnetron sputtering systems using ring-type permanent magnets
.
by
Ohnuma, Toshiro
;
Subject:
Magnetron sputtering system
;
ring-type magnet
.
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Relevance: 11.27%
Low-temperature deposition of hudrogenated amorphous silicon (a-Si:H): control of polyhydride incorporation and its effects on thin film properties
.
by
Lucovsky, G.,et.al.
;
Subject:
Amorphous silicon
;
Reactive magnetron sputtering (RMS)
;
Thin film
.
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Relevance: 11.03%
Titanium nitride (TiN) thin films grown by DC/RF planar magnetron sputtering
.
by
Absin, Rex S.
; Diliman, Q.C: University of the Philippines, 1995.
Subject:
Physics
;
Titanium nitride (TiN)
;
Planar magnetron sputtering
;
Films, Thin
.
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Relevance: 10.92%
<A> new anode-electrode structure for sputter deposition of high-quality Y-Ba-Cu-O thin films
.
by
Kisu, Takanobu
;
Subject:
High-quality Y-Ba-Cu-O thin film
;
rf magnetron sputtering
;
New anode structure
;
Reliable synthesis
;
High jc, smooth surface
.
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Relevance: 9.68%
Growth of indium aluminum nitride films using reactive RF-magnetron sputtering
.
by
Ceniza, Claude R.
; 2012.
Subject:
Engineering
;
Materials science
;
Sputtering
;
Indium aluminum nitride films
;
Collision processes
;
Generation of ion
;
Thin film growth process
;
RF-magnetron sputtering
.
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Relevance: 9.54%
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