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Films, Thin
returned
1
record.
Titanium nitride (TiN) thin films grown by DC/RF planar magnetron sputtering
.
by
Absin, Rex S.
; Diliman, Q.C: University of the Philippines, 1995.
Subject:
Physics
;
Titanium nitride (TiN)
;
Planar magnetron sputtering
;
Films, Thin
.
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