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Collision processes
returned
1
record.
Growth of indium aluminum nitride films using reactive RF-magnetron sputtering
.
by
Ceniza, Claude R.
; 2012.
Subject:
Engineering
;
Materials science
;
Sputtering
;
Indium aluminum nitride films
;
Collision processes
;
Generation of ion
;
Thin film growth process
;
RF-magnetron sputtering
.
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