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Valmoria, Nicomedes Baz
returned
1
record.
Thin-film deposition of zirconium nitride (ZrN) via the plasma sputter-type multicusp ion source
.
by
Valmoria, Nicomedes Baz
; 2000.
Subject:
Thin films
;
Zirconium compounds
;
Plasma (ionized gases)
.
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