Search Results       Your search for [author]Fernandez, Marcedon S. returned 1 record.           Formation of SiH on silicon (100) using low energy negative hydrogen ions from a magnetized sheet plasma source. by Fernandez, Marcedon S.; 2004. Subject: Amorphous semiconductors; Silane compounds; Hydrogen ions; Plasma-enhanced chemical vapor deposition.          Add to Book Cart Relevance: 20.26%